INTEGRATED PYROELECTRIC SENSOR BASED ON VDF/TrFE COPOLYMER
نویسنده
چکیده
This paper presents an integrated pyroelectric sensor based on a Vinylidene Fluoride TriFluoroEthylene (VDF/TrFE) copolymer. A silicon substrate that contains FET readout electronics is coated with the VDF/TrFE copolymer film using a spin-coating technique. On-chip poling of the copolymer has been applied using a stepwise poling at room temperature. An array of 3x1 pyroelectric sensor has been realized. Current and voltage sensitivities and noise of this sensor have been measured. A signal-to-noise of 80 dB has been achieved.
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